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MEASUREMENT


        Simulation tools                                        Table 1. natural frequency (Freq.), mode participation factor (MPF),
        For modal analysis, ANSYS and other simulation tools assume   and axis of interest
        harmonic motion for every point in the design. The displacement and
        acceleration of all points in a design are solved as eigenvalues and   Mode   Freq. (Hz)   Axis   MPF   MPF Comment
        eigenvectors – in this case, natural frequencies and mode shapes.  1   500   X      0.001    Weak mode
                                                                2       800       X         0.45     Strong mode
        Natural frequency and mode shape                        3       1500      Y         0.6      Strong mode
        The mass matrix M, stiffness matrix K, angular frequency ω i, and   4   3000   Y    0.002    Weak mode
        mode shape {Φ i} are related by equation 1, which is used in FEM   5   10,000   Z   0.33     Strong mode
                       1
        programs like ANSYS.  The natural frequency f i is calculated by
        dividing ω i by 2π, and the mode shape {Φ i} provides the relative
        deformation patterns of the material at specific natural frequencies.  Interpreting the modal analysis results
                                                               From the previous section we know that modal analysis
                                                               will tell you what the natural frequencies are in your axis of
                                                               interest. In addition, the MPF will enable the designer to decide
        For a single degree of freedom system, the frequency is simply   if a frequency can be ignored in a design. To complete the
        expressed by:                                          interpretation of modal analysis, it’s important to understand that
                                                               all points on a structure vibrate at the same frequency (global
                                                               variable), but the amplitude of vibration (or mode shape) at each
                                                               point is different. For example, an 18 kHz frequency can affect
        Equation 2 provides a simple, intuitive way to evaluate a design.   the top of the mechanical enclosure more than the bottom. The
        As you reduce the height of the sensor enclosure, the stiffness   mode shape (local variable) has a stronger amplitude at the top
        increases and the mass decreases – therefore, the natural   of the enclosure compared to the bottom, as shown in Figure
        frequency increases. Also, as you increase the height of the   3. This means that while the enclosure structure top part is
        enclosure, the stiffness reduces and the mass increases, resulting in   strongly excited by an 18 kHz frequency, the MEMS sensor at the
        a lower natural frequency.                             enclosure bottom will also be affected by this frequency, though
           Most designs have multiple degrees of freedom. Some designs   to a lesser degree.
        have hundreds. Using the FEM provides quick calculations for
        equation 1, which would be very time consuming to do by hand.  Timoshenko differential equation of vibration
                                                               The Timoshenko equation is suitable for modeling thick,
        Mode participation factor                              short beams or beams subject to multi kilohertz vibration. A
        The mode participation factor (MPF) is used to determine which   vibration sensor, as shown in Figure 2, is analogous to a thick,
        modes and natural frequencies are the most important for your   short cylindrical cross section, which can be modeled using the
        design. The mode shape {Φ i}, mass matrix M, and excitation   Timoshenko equation. The equation is a fourth-order differential
                                        1
        direction vector D are related by Equation 3  solving for MPF. The   equation with analytical solutions for restricted cases. The FEM,
        square of the participation factor is the effective mass.  as presented in equation 1 to equation 3, provides the most
                                                               convenient method of solving the Timoshenko equation using
                                                               multidimensional matrices, which scale with the number of
        The MPF and effective mass measure the amount of mass moving in   degrees of freedom of the design.
        each direction for each mode. A high value in a direction means the
        mode will be excited by forces such as vibration, in that direction.
           Using the MPF in conjunction with the natural frequency
        will enable the designer to identify potential design problems.
        For example, the lowest natural frequency produced by a modal
        analysis may not be the biggest design problem, as it may not have
        as large a participation factor in your direction of interest (x-, y-, or
        z-axis plane) relative to all other modes.
           The examples shown in Table 1 illustrate that while a 500 Hz
        natural frequency is predicted in simulation for the x-axis, the
        mode is weakly excited and is unlikely to be a problem. An 800 Hz
        strong mode is excited in the enclosure x-axis and will be a problem
        if the MEMS sensitive axis is orientated in the enclosure x-axis.
        However, this x-axis strong mode at 800 Hz is not of interest if the
        designer has their MEMS sensor PCB orientated to measure in the   Figure 3. A vibration sensor enclosure’s natural frequency, mode shape
                                                               in axis of interest, and relative amplitude at the top and bottom of the
        enclosure z-axis.                                      enclosure.



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